GPFA-Series High Purity All-Fluoropolymer Filter Cartridges provide superior chemical compatibility, temperature range, and ultra-low extractables for the most demanding needs of the micro-electronics industry. Ideal for aggressive “wet-etch and clean” applications. The PTFE membrane offers high flowrates at low pressure drop, while the PFA-440HP hardware exhibits superior chemical resistance and high temperature tolerance. Minimized ionic and TOC extractables are attained through a specialized UPW flush process. Wet-packing option is available for ease of wetting in aqueous applications. Available in the full range of micron ratings in order to suit all applications.

Typical Applications

Highly Reactive Chemicals

• Acetic Acid (10%)
• Hydrofluoric Acid (50%)
• Hydrogen Peroxide (30%)
• Nitric Acid (conc.)
• Phosphoric Acid (conc.)
• Sulfuric Acid (cavonc.)
• Ammonium Hydroxide (conc.)
• Potassium Hydroxide (conc.)
• Sodium Hydroxide (conc.)
• TMAH (5%)
• Aqua Regia (HNO3:HCl)
• BOE; NH4F:HF
• Mixed Acid Etch
• ChromPhos Etch
• Piranha Etch